Imec Secures Rare ASML High NA EUV Tool to Anchor Europe’s Chip Sovereignty

LEUVEN, Belgium - Belgian chip research hub imec has secured an ASML High NA EUV lithography machine-one of fewer than a dozen globally-valued at $400 million.

The tool will anchor imec’s €2.5 billion NanoIC pilot line, backed by €1.4 billion in public funding, including from the EU Chips Act.

ASML is the world’s sole supplier of extreme ultraviolet lithography tools. High NA refers to the system’s larger numerical aperture-enabling chip features up to 66% smaller, faster, and more energy efficient.

Intel and SK Hynix plan to deploy High NA tools for AI logic and high-bandwidth memory chips as early as 2027.

imec CEO Luc Van den Hove called the acquisition “the core of Europe’s strategic autonomy and technological sovereignty.”